Aiming at the problems of long monitoring time, low sensitivity and low precision of traditional methods, a nano sensor for near zero emission monitoring of sulfur hexafluoride (SF6) was proposed. The characteristics of SF6 gas were analyzed. The infrared spectrum of SF6 gas was obtained by spectral absorption method. The laser of Laixi series is used as the hardware of SF6 gas monitoring. The nano sensor array is designed, and the near zero emission state of SF6 is monitored by using the nano sensor node optimization method. The experimental results show that compared with the traditional method, the nano sensor method can shorten the monitoring time (less than 3.0 seconds), improve the monitoring sensitivity and accuracy. The results show that the method can monitor the air emission and environmental pollution accurately and timely.